A simple introduction to the vacuum electrode, just only including two parts: vacuum electrode introduction and vacuum electrode structure situation.
Vacuum electrode introduction
There are many processes in a vacuum chamber that require the introduction of electrodes into the chamber. Usually made of electrode lead-in parts (including electrode structure, lead-in wire), using vacuum static seal and vacuum chamber connection. Between these wires and wires, between the wires and the vacuum chamber wall should meet the electrical insulation, vacuum seal and withstand a certain current load.
The selection of electrode lead-in wire and electrode sealing material depends on the operating voltage, current, frequency, temperature, etc. Usually, the electrode lead-in wire is divided into permanent sealed electrode lead-in wire and detachable sealed electrode lead-in wire.
Permanent sealing electrode lead-in wire adopts glass-to-metal sealing or ceramic-to- metal sealing, according to the shape can be divided into rod seal, core seal, ribbon seal, disc seal and cup seal.
Strong current or high voltage lead-in wires usually combine the two sealing forms. The lead wire and glass (or ceramic) are permanently sealed, and the sealed electrode lead and vacuum chamber (pipe) are sealed with detachable (or semi-detachable) wax.
Vacuum electrode structure situation
There are many kinds of vacuum electrode structure, according to the electrode sealing material classification, can be divided into glass metal sealing electrode and ceramic metal sealing electrode; According to the vacuum voltage level to classify, can be divided into vacuum with low voltage electrode and vacuum with high voltage electrode two. Each electrode form has various structural forms such as small current, large current, and special requirements to meet the needs of many vacuum devices.
1. Glass-to-metal sealing electrode, this structure is characterized by sealing the metal core column in the glass with a special design shape, should avoid stress in the glass.
2. Ceramic-to-metal sealing electrode, can be divided into brazing sealing and rubber sealing two. The characteristic of this structure is that the metal core column is sealed together with the ceramic through solder or rubber ring, and the ceramic as an insulator is composed of solder and the metal core column, which has simple structure and good sealing performance, and belongs to the permanent electrode sealing form.
3. vacuum with low-voltage electrode, low voltage is generally voltage below 1000 volts, and the voltage above 1000 volts is called high voltage.
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